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Impact of the precursor system on Nb2O5 thin films: comparing citric and tartaric acid

dc.contributor.authorDewulf, D.
dc.contributor.authorDe Dobbelaere, D.
dc.contributor.authorPeys, Nick
dc.contributor.authorDamm, H.
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.date.accessioned2021-10-20T10:42:49Z
dc.date.available2021-10-20T10:42:49Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20602
dc.sourceIIOimport
dc.titleImpact of the precursor system on Nb2O5 thin films: comparing citric and tartaric acid
dc.typeOral presentation
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.source.peerreviewno
dc.source.conferenceCHEMCYS
dc.source.conferencedate1/03/2012
dc.source.conferencelocationBlankenberge Belgium
imec.availabilityPublished - imec


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