Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Control of texture and oxygen stoichiometry in reactively sputtered RuO2 electrode layers for low fatigue PZT FECAPs
Publication:
Control of texture and oxygen stoichiometry in reactively sputtered RuO2 electrode layers for low fatigue PZT FECAPs
Date
1997
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Norga, Gerd
;
Wouters, Dirk
;
Conard, Thierry
;
Maes, Herman
Journal
Abstract
Description
Metrics
Views
1928
since deposited on 2021-09-30
412
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1928
since deposited on 2021-09-30
412
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations