Impact of Fin height variations on SRAM yield

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Authors
Dobrovolny, Petr; Zuber, Paul; Miranda Corbalan, Miguel; Garcia Bardon, Marie; Chiarella, Thomas; Buchegger, Peter; Mercha, Abdelkarim; Verkest, Diederik; Steegen, An; Horiguchi, Naoto
Conference
International Symposium on VLSI Technology, Systems and Applications - VLSI-TSA
Title
Impact of Fin height variations on SRAM yield
Publication type
Proceedings paper
Embargo date
9999-12-31
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