Publication:

Impact of Fin height variations on SRAM yield

Date

2012

Proceedings Paper

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Files

22846.pdf 381.64 KB

Author(s)

Dobrovolny, Petr

;

;

Miranda Corbalan, Miguel

;

Garcia Bardon, Marie

;

Chiarella, Thomas

;

Buchegger, Peter

;

Mercha, Abdelkarim

;

Verkest, Diederik

;

;

Horiguchi, Naoto

Statistics

1929 since deposited on 2021-10-20

Acq. date: 2026-07-17