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Platinum template layer for texture control in PZT fecaps with reactively sputtered RuO2 electrode layers

dc.contributor.authorNorga, Gerd
dc.contributor.authorWouters, Dirk
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-30T09:21:33Z
dc.date.available2021-09-30T09:21:33Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2062
dc.sourceIIOimport
dc.titlePlatinum template layer for texture control in PZT fecaps with reactively sputtered RuO2 electrode layers
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceMaterials Research Society 1997 Fall Meeting : Symposium on Ferroelectric Thin Films VI
dc.source.conferencedate30/11/1997
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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