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Chip embedding by spin-on-dielectrics

dc.contributor.authorDuval, Fabrice
dc.contributor.authorSoussan, Philippe
dc.contributor.authorDetalle, Mikael
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-20T10:50:18Z
dc.date.available2021-10-20T10:50:18Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20635
dc.sourceIIOimport
dc.titleChip embedding by spin-on-dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorDetalle, Mikael
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.conference15th Symposium on Polymers for Microelectronics
dc.source.conferencedate8/05/2012
dc.source.conferencelocationWilmington, DE USA
imec.availabilityPublished - imec


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