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SiGe MEMS at processing temperatures below 250C

dc.contributor.authorEl Rifai, Joumana
dc.contributor.authorSedky, Sherif
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorSeveri, Simone
dc.contributor.authorLin, Dennis
dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-20T10:52:01Z
dc.date.available2021-10-20T10:52:01Z
dc.date.issued2012
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20643
dc.sourceIIOimport
dc.titleSiGe MEMS at processing temperatures below 250C
dc.typeJournal article
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.identifier.doi10.1016/j.sna.2012.01.035
dc.source.peerreviewyes
dc.source.beginpage230
dc.source.endpage239
dc.source.journalSensors and Actuators A: Physical
dc.source.volume188
imec.availabilityPublished - imec


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