Publication:

SiGe MEMS at processing temperatures below 250C

Date

2012

Journal article

https://doi.org/10.1016/j.sna.2012.01.035

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Author(s)

El Rifai, Joumana

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Sangameswaran, Sandeep

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Van Hoof, Chris

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Journal

Sensors and Actuators A: Physical

Metrics

1865 since deposited on 2021-10-20

Acq. date: 2026-01-09