SiGe MEMS at processing temperatures below 250C

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Authors
El Rifai, Joumana; Sedky, Sherif; Van Hoof, Rita; Severi, Simone; Lin, Dennis; Sangameswaran, Sandeep; Puers, Bob; Van Hoof, Chris; Witvrouw, Ann
DOI
10.1016/j.sna.2012.01.035
ISSN
0924-4247
Journal
Sensors and Actuators A: Physical
Volume
188
Title
SiGe MEMS at processing temperatures below 250C
Publication type
Journal article
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