Publication:

SiGe MEMS at processing temperatures below 250C

Date

2012
Journal article
https://doi.org/10.1016/j.sna.2012.01.035
Simple item page Full metadata Statistics
 
dc.contributor.authorEl Rifai, Joumana
dc.contributor.authorSedky, Sherif
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorSeveri, Simone
dc.contributor.authorLin, Dennis
dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorWitvrouw, Ann
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.date.accessioned2021-10-20T10:52:01Z
dc.date.available2021-10-20T10:52:01Z
dc.date.issued2012
dc.identifier.doi10.1016/j.sna.2012.01.035
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20643
dc.source.beginpage230
dc.source.endpage239
dc.source.journalSensors and Actuators A: Physical
dc.source.volume188
dc.title

SiGe MEMS at processing temperatures below 250C

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles