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Metal-organic framework ZIF-8 films as low-k dielectrics in microelectronics

dc.contributor.authorEslava, Salva
dc.contributor.authorZhang, Liping
dc.contributor.authorVanstreels, Kris
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorSaiz, E.
dc.date.accessioned2021-10-20T10:55:59Z
dc.date.available2021-10-20T10:55:59Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20659
dc.sourceIIOimport
dc.titleMetal-organic framework ZIF-8 films as low-k dielectrics in microelectronics
dc.typeMeeting abstract
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewyes
dc.source.beginpage51
dc.source.endpage51
dc.source.conference3rd International Conference on Metal-Organic Frameworks and Open Framework Compounds
dc.source.conferencedate16/09/2012
dc.source.conferencelocationEdinburgh UK
imec.availabilityPublished - imec


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