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SSRM technique for 2D and 3D carrier mapping at the nm-scale

dc.contributor.authorEyben, Pierre
dc.date.accessioned2021-10-20T10:57:07Z
dc.date.available2021-10-20T10:57:07Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20664
dc.sourceIIOimport
dc.titleSSRM technique for 2D and 3D carrier mapping at the nm-scale
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.orcidimecEyben, Pierre::0000-0003-3686-556X
dc.source.peerreviewno
dc.source.conference15th TechnicalL & Scientific Meeting of ARCSIS "Characterization for Microelectronics and Photovoltaics"
dc.source.conferencedate28/11/2012
dc.source.conferencelocationAix en Provence France
imec.availabilityPublished - imec


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