Show simple item record

Determination par EDS de l'épaisseur et de la composition de films minces multicouches pour applications nanoélectroniques

dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T11:04:52Z
dc.date.available2021-10-20T11:04:52Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20694
dc.sourceIIOimport
dc.titleDetermination par EDS de l'épaisseur et de la composition de films minces multicouches pour applications nanoélectroniques
dc.typeMeeting abstract
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conference5ème Conférence Francophone sur les Spectroscopies d'Electrons - ELSPEC
dc.source.conferencedate22/05/2012
dc.source.conferencelocationLouvain La Neuve Belgium
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record