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Atom probe tomography for advanced semiconductor metrology

dc.contributor.authorGilbert, Matthieu
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorKumar, Arul
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T11:12:21Z
dc.date.available2021-10-20T11:12:21Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20723
dc.sourceIIOimport
dc.titleAtom probe tomography for advanced semiconductor metrology
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceInternational Field Emission Symposium- IFES
dc.source.conferencedate21/05/2012
dc.source.conferencelocationTuscaloosa, AL USA
imec.availabilityPublished - imec
imec.internalnotesProceedings for the IFES 2012 meeting will be published as a special issue of Ultramicroscopy


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