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Pore sealing of high porosity mesoporous silica films by self-assembled carbon-bridged organosilicas

dc.contributor.authorGoethals, Frederik
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVan der Voort, Pascal
dc.contributor.authorVan Driessche, Isabel
dc.date.accessioned2021-10-20T11:13:36Z
dc.date.available2021-10-20T11:13:36Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20728
dc.sourceIIOimport
dc.titlePore sealing of high porosity mesoporous silica films by self-assembled carbon-bridged organosilicas
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.beginpageC1.3
dc.source.conferenceMRS Spring Meeting Symposium C: Interconnect Challenges for CMOS Technology
dc.source.conferencedate9/04/2012
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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