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Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance

dc.contributor.authorGoethals, Frederik
dc.contributor.authorCiofi, Ivan
dc.contributor.authorMadia, Oreste
dc.contributor.authorVanstreels, Kris
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorVan Der Voort, Pascal
dc.contributor.authorVan Driessche, Isabel
dc.date.accessioned2021-10-20T11:13:52Z
dc.date.available2021-10-20T11:13:52Z
dc.date.issued2012
dc.identifier.issn0959-9428
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20729
dc.sourceIIOimport
dc.titleUltra low-k cyclic carbon-bridged PMO films with a high chemical resistance
dc.typeJournal article
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorMadia, Oreste
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewyes
dc.source.beginpage8281
dc.source.endpage8286
dc.source.journalJournal of Materials Chemistry
dc.source.issue17
dc.source.volume22
imec.availabilityPublished - imec


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