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Lattice defects in Si1-xGex devices by proton irradiation and their effect on device performance

dc.contributor.authorOhyama, Hidenori
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorTakami, Y.
dc.contributor.authorSunaga, H.
dc.contributor.authorPoortmans, Jef
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-09-30T09:22:44Z
dc.date.available2021-09-30T09:22:44Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2072
dc.sourceIIOimport
dc.titleLattice defects in Si1-xGex devices by proton irradiation and their effect on device performance
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage239
dc.source.endpage244
dc.source.conferenceProceedings of the 7th International Autumn Meeting : Gettering and Defect Engineering in Semiconductor Technology - GADEST '97
dc.source.conferencedate5/10/1997
dc.source.conferencelocationSpa Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena. Vols. 57-58


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