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GaN growth on patterned silicon substrates. A thermo mechanical study on wafer bow reduction

dc.contributor.authorGonzalez, Mario
dc.contributor.authorCheng, Kai
dc.contributor.authorTseng, Peter
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-20T11:15:11Z
dc.date.available2021-10-20T11:15:11Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20734
dc.sourceIIOimport
dc.titleGaN growth on patterned silicon substrates. A thermo mechanical study on wafer bow reduction
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewyes
dc.source.conference13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE
dc.source.conferencedate15/04/2012
dc.source.conferencelocationLisboa Portugal
imec.availabilityPublished - imec


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