CMOS-integrated poly-SiGe piezoresistive pressure sensor

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Authors

Gonzalez, Pilar; Rakowski, Michal; San Segundo Bello, David; Severi, Simone; De Meyer, Kristin; Witvrouw, Ann

ISSN

0741-3106

Issue

8

Journal

IEEE Electron Device Letters

Volume

33

Title

CMOS-integrated poly-SiGe piezoresistive pressure sensor

Publication type

Journal article

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