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CMOS-integrated poly-SiGe piezoresistive pressure sensor

dc.contributor.authorGonzalez, Pilar
dc.contributor.authorRakowski, Michal
dc.contributor.authorSan Segundo Bello, David
dc.contributor.authorSeveri, Simone
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-20T11:16:13Z
dc.date.available2021-10-20T11:16:13Z
dc.date.issued2012
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20738
dc.sourceIIOimport
dc.titleCMOS-integrated poly-SiGe piezoresistive pressure sensor
dc.typeJournal article
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorRakowski, Michal
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Meyer, Kristin
dc.source.peerreviewyes
dc.source.beginpage1204
dc.source.endpage1206
dc.source.journalIEEE Electron Device Letters
dc.source.issue8
dc.source.volume33
imec.availabilityPublished - imec


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