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Improved surface cleaning by in-situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells

dc.contributor.authorGranata, Stefano
dc.contributor.authorBearda, Twan
dc.contributor.authorDross, Frederic
dc.contributor.authorGordon, Ivan
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-20T11:18:59Z
dc.date.available2021-10-20T11:18:59Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20748
dc.sourceIIOimport
dc.titleImproved surface cleaning by in-situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells
dc.typeMeeting abstract
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage8.5
dc.source.conference11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate16/09/2012
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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