dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | Rincon Delgadillo, Paulina | |
dc.contributor.author | Nealey, Paul | |
dc.contributor.author | Younkin, Todd | |
dc.contributor.author | Matsunaga, Koichi | |
dc.contributor.author | Somervell, Mark | |
dc.contributor.author | Nafus, Kathleen | |
dc.date.accessioned | 2021-10-20T11:21:10Z | |
dc.date.available | 2021-10-20T11:21:10Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20756 | |
dc.source | IIOimport | |
dc.title | Implementation of self-assembly in a 300mm processing environment | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | Rincon Delgadillo, Paulina | |
dc.contributor.imecauthor | Nafus, Kathleen | |
dc.source.peerreview | no | |
dc.source.conference | IEEE Litho Workshop | |
dc.source.conferencedate | 25/06/2012 | |
dc.source.conferencelocation | Williamsburg, VA USA | |
imec.availability | Published - imec | |