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Quantification of shot noise contributions to contact hole local CD non-uniformity

dc.contributor.authorGronheid, Roel
dc.contributor.authorWinroth, Gustaf
dc.contributor.authorVaglio Pret, Alessandro
dc.contributor.authorYounkin, Todd
dc.date.accessioned2021-10-20T11:22:15Z
dc.date.available2021-10-20T11:22:15Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20760
dc.sourceIIOimport
dc.titleQuantification of shot noise contributions to contact hole local CD non-uniformity
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVaglio Pret, Alessandro
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage83220M
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography III
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE; Vol. 8322


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