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Poly-SiGe-based MEMS thin-film encapsulation

dc.contributor.authorGuo, Bin
dc.contributor.authorWang, Bo
dc.contributor.authorWen, Lianggong
dc.contributor.authorHelin, Philippe
dc.contributor.authorClaes, Gert
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVerbist, Agnes
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorVereecke, Guy
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorOsman, Haris
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTanaka, Shuji
dc.contributor.authorSeveri, Simone
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-20T11:22:57Z
dc.date.available2021-10-20T11:22:57Z
dc.date.issued2012
dc.identifier.issn1057-7157
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20762
dc.sourceIIOimport
dc.titlePoly-SiGe-based MEMS thin-film encapsulation
dc.typeJournal article
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorSeveri, Simone
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage21
dc.source.endpage1
dc.source.journalJournal of Microelectromechanical Systems
dc.source.issue120
dc.source.volume110
imec.availabilityPublished - open access


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