Poly-SiGe-based MEMS thin-film encapsulation

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Authors

Guo, Bin; Wang, Bo; Wen, Lianggong; Helin, Philippe; Claes, Gert; De Coster, Jeroen; Du Bois, Bert; Verbist, Agnes; Van Hoof, Rita; Vereecke, Guy; Haspeslagh, Luc; Tilmans, Harrie; Decoutere, Stefaan; Osman, Haris; Puers, Bob; De Wolf, Ingrid; Tanaka, Shuji; Severi, Simone; Witvrouw, Ann

ISSN

1057-7157

Issue

120

Journal

Journal of Microelectromechanical Systems

Volume

110

Title

Poly-SiGe-based MEMS thin-film encapsulation

Publication type

Journal article

Embargo date

9999-12-31

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