Publication:

Poly-SiGe-based MEMS thin-film encapsulation

Date

2012

Journal article

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Files

23165.pdf 1.95 MB

Author(s)

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Helin, Philippe

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De Coster, Jeroen

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Haspeslagh, Luc

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Tilmans, Harrie

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Decoutere, Stefaan

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De Wolf, Ingrid

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Journal

Journal of Microelectromechanical Systems

Statistics

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Acq. date: 2026-02-25