Poly-SiGe-based MEMS thin-film encapsulation

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Author(s)

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Helin, Philippe

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De Coster, Jeroen

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Haspeslagh, Luc

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Tilmans, Harrie

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Decoutere, Stefaan

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De Wolf, Ingrid

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Journal

Journal of Microelectromechanical Systems

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1958 since deposited on 2021-10-20

Acq. date: 2025-10-23