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Integrated differential pressure sensor in silicon-on-insulator

dc.contributor.authorHallynck, Elewout
dc.contributor.authorBienstman, Peter
dc.date.accessioned2021-10-20T11:26:21Z
dc.date.available2021-10-20T11:26:21Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20773
dc.sourceIIOimport
dc.titleIntegrated differential pressure sensor in silicon-on-insulator
dc.typeProceedings paper
dc.contributor.imecauthorBienstman, Peter
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage445
dc.source.endpage446
dc.source.conferenceIEEE Photonics Conference
dc.source.conferencedate23/09/2012
dc.source.conferencelocationBurlingame, CA USA
imec.availabilityPublished - open access


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