Integrated differential pressure sensor in silicon-on-insulator
dc.contributor.author | Hallynck, Elewout | |
dc.contributor.author | Bienstman, Peter | |
dc.date.accessioned | 2021-10-20T11:26:21Z | |
dc.date.available | 2021-10-20T11:26:21Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20773 | |
dc.source | IIOimport | |
dc.title | Integrated differential pressure sensor in silicon-on-insulator | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Bienstman, Peter | |
dc.contributor.orcidimec | Bienstman, Peter::0000-0001-6259-464X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 445 | |
dc.source.endpage | 446 | |
dc.source.conference | IEEE Photonics Conference | |
dc.source.conferencedate | 23/09/2012 | |
dc.source.conferencelocation | Burlingame, CA USA | |
imec.availability | Published - open access |