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TiN scanning probes for electrical profiling of nanoelectronics device structures

dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorCelano, Umberto
dc.contributor.authorMoussa, Alain
dc.contributor.authorArstila, Kai
dc.contributor.authorEyben, Pierre
dc.contributor.authorMajeed, Bivragh
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorWerner, Thilo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T11:27:11Z
dc.date.available2021-10-20T11:27:11Z
dc.date.issued2012
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20776
dc.sourceIIOimport
dc.titleTiN scanning probes for electrical profiling of nanoelectronics device structures
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage255
dc.source.endpage258
dc.source.journalMicroelectronic Engineering
dc.source.volume97
dc.identifier.urlhttp://dx.doi.org/10.1016/j.mee.2012.04.026
imec.availabilityPublished - open access


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