Publication:

TiN scanning probes for electrical profiling of nanoelectronics device structures

Date

2012
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

24996.pdf 1015.04 KB

Author(s)

Hantschel, Thomas  
;
Schulze, Andreas
;
Celano, Umberto  
;
Moussa, Alain  
;
Arstila, Kai
;
Eyben, Pierre  
;
Majeed, Bivragh  
;
Sabuncuoglu Tezcan, Deniz  
;
Werner, Thilo
;
Vandervorst, Wilfried  

Journal

Microelectronic Engineering

Abstract

Description

Statistics

Views

1942 since deposited on 2021-10-20
1last month
Acq. date: 2026-06-02

Citations

Statistics

Views

1942 since deposited on 2021-10-20
1last month
Acq. date: 2026-06-02

Citations