Publication:

TiN scanning probes for electrical profiling of nanoelectronics device structures

Date

2012
Journal article
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dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorCelano, Umberto
dc.contributor.authorMoussa, Alain
dc.contributor.authorArstila, Kai
dc.contributor.authorEyben, Pierre
dc.contributor.authorMajeed, Bivragh
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorWerner, Thilo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.accessioned2021-10-20T11:27:11Z
dc.date.available2021-10-20T11:27:11Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20776
dc.identifier.urlhttp://dx.doi.org/10.1016/j.mee.2012.04.026
dc.source.beginpage255
dc.source.endpage258
dc.source.journalMicroelectronic Engineering
dc.source.volume97
dc.title

TiN scanning probes for electrical profiling of nanoelectronics device structures

dc.typeJournal article
dspace.entity.typePublication
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