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TiN scanning probes for electrical profiling of nanoelectronics device structures
Publication:
TiN scanning probes for electrical profiling of nanoelectronics device structures
Date
2012
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Schulze, Andreas
;
Celano, Umberto
;
Moussa, Alain
;
Arstila, Kai
;
Eyben, Pierre
;
Majeed, Bivragh
;
Sabuncuoglu Tezcan, Deniz
;
Werner, Thilo
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
Description
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1936
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1936
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations