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Nanoscopic controlled material removal using diamond tips

dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorTsigkourakos, Menelaos
dc.contributor.authorArstila, Kai
dc.contributor.authorMoussa, Alain
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-20T11:27:45Z
dc.date.available2021-10-20T11:27:45Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20778
dc.sourceIIOimport
dc.titleNanoscopic controlled material removal using diamond tips
dc.typeOral presentation
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XVII
dc.source.conferencedate14/03/2012
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec
imec.internalnotes5.31


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