Time-resolved monitoring of cavitation activity in megasonic cleaning systems

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Authors

Hauptmann, Marc; Brems, Steven; Struyf, Herbert; Mertens, Paul; Heyns, Marc; De Gendt, Stefan; Glorieux, Christ

ISSN

0034-6748

Issue

3

Journal

Review of Scientific Instruments

Volume

83

Title

Time-resolved monitoring of cavitation activity in megasonic cleaning systems

Publication type

Journal article

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