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Time-resolved monitoring of cavitation activity in megasonic cleaning systems

dc.contributor.authorHauptmann, Marc
dc.contributor.authorBrems, Steven
dc.contributor.authorStruyf, Herbert
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGlorieux, Christ
dc.date.accessioned2021-10-20T11:31:15Z
dc.date.available2021-10-20T11:31:15Z
dc.date.issued2012
dc.identifier.issn0034-6748
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20791
dc.sourceIIOimport
dc.titleTime-resolved monitoring of cavitation activity in megasonic cleaning systems
dc.typeJournal article
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage34904
dc.source.journalReview of Scientific Instruments
dc.source.issue3
dc.source.volume83
imec.availabilityPublished - imec


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