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Poly-SiGe-based CMUT array with high acoustical pressure

dc.contributor.authorHelin, Philippe
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorVerbist, Agnes
dc.contributor.authorBryce, George
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSeveri, Simone
dc.date.accessioned2021-10-20T11:32:08Z
dc.date.available2021-10-20T11:32:08Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20794
dc.sourceIIOimport
dc.titlePoly-SiGe-based CMUT array with high acoustical pressure
dc.typeProceedings paper
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSeveri, Simone
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage305
dc.source.endpage308
dc.source.conference25th IEEE International Conference on Micro Electro Mechanical Systems - IEEE MEMS
dc.source.conferencedate29/01/2012
dc.source.conferencelocationParis France
imec.availabilityPublished - open access


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