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Challenges for introducing Ge and III/V devices into CMOS technologies

dc.contributor.authorHeyns, Marc
dc.contributor.authorAlian, AliReza
dc.contributor.authorBrammertz, Guy
dc.contributor.authorCaymax, Matty
dc.contributor.authorEneman, Geert
dc.contributor.authorFranco, Jacopo
dc.contributor.authorGencarelli, Federica
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHellings, Geert
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorHoussa, Michel
dc.contributor.authorKaczer, Ben
dc.contributor.authorLin, Dennis
dc.contributor.authorLoo, Roger
dc.contributor.authorMerckling, Clement
dc.contributor.authorMeuris, Marc
dc.contributor.authorMitard, Jerome
dc.contributor.authorNyns, Laura
dc.contributor.authorSioncke, Sonja
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVincent, Benjamin
dc.contributor.authorWaldron, Niamh
dc.contributor.authorWitters, Liesbeth
dc.date.accessioned2021-10-20T11:37:00Z
dc.date.available2021-10-20T11:37:00Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20811
dc.sourceIIOimport
dc.titleChallenges for introducing Ge and III/V devices into CMOS technologies
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.source.peerreviewyes
dc.source.beginpage5D.1
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate15/04/2012
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - imec


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