Authors

Hikavyy, Andriy; Vanherle, Wendy; Witters, Liesbeth; Vincent, Benjamin; Dekoster, Johan; Loo, Roger

Conference

SiGe, Ge, and Related Compunds 5: Materials, Processing, and Devices

Title

High Ge content SiGe selective processes for manufacturing source/drain in the next generations of pMOS transistors

Publication type

Proceedings paper

Embargo date

9999-12-31