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Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel

dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorSasaki, Yuichiro
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorCho, Moon Ju
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorHellings, Geert
dc.contributor.authorMitard, Jerome
dc.contributor.authorFranco, Jacopo
dc.contributor.authorEneman, Geert
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorWaldron, Niamh
dc.contributor.authorLin, Dennis
dc.contributor.authorPantisano, Luigi
dc.contributor.authorCollaert, Nadine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-20T11:40:41Z
dc.date.available2021-10-20T11:40:41Z
dc.date.issued2012-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20823
dc.sourceIIOimport
dc.titleDevice architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel
dc.typeProceedings paper
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewyes
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate25/09/2012
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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