Cryogenic approaches to low-damage patterning of porous low-k films

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Authors
Iacopi, Francesca; Stauss, Sven; Terashima, Kazuo; Baklanov, Mikhaïl
Conference
Plasma Etch and Strip in Mcroelectronics - PESM
Title
Cryogenic approaches to low-damage patterning of porous low-k films
Publication type
Meeting abstract
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