Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping
dc.contributor.author | Impellizzeri, Giuliana | |
dc.contributor.author | Napolitani, Enrico | |
dc.contributor.author | Boninelli, Simona | |
dc.contributor.author | Privitera, Vittorio | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Priolo, Francesco | |
dc.date.accessioned | 2021-10-20T11:46:20Z | |
dc.date.available | 2021-10-20T11:46:20Z | |
dc.date.issued | 2012 | |
dc.identifier.issn | 1882-0778 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20842 | |
dc.source | IIOimport | |
dc.title | Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | yes | |
dc.source.beginpage | 21301 | |
dc.source.journal | Applied Physics Express | |
dc.source.issue | 2 | |
dc.source.volume | 5 | |
imec.availability | Published - imec |
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