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Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping

dc.contributor.authorImpellizzeri, Giuliana
dc.contributor.authorNapolitani, Enrico
dc.contributor.authorBoninelli, Simona
dc.contributor.authorPrivitera, Vittorio
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPriolo, Francesco
dc.date.accessioned2021-10-20T11:46:20Z
dc.date.available2021-10-20T11:46:20Z
dc.date.issued2012
dc.identifier.issn1882-0778
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20842
dc.sourceIIOimport
dc.titleAluminium implantation in germanium: uphill diffusion, electrical activation and trapping
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage21301
dc.source.journalApplied Physics Express
dc.source.issue2
dc.source.volume5
imec.availabilityPublished - imec


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