Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping

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Authors
Impellizzeri, Giuliana; Napolitani, Enrico; Boninelli, Simona; Privitera, Vittorio; Clarysse, Trudo; Vandervorst, Wilfried; Priolo, Francesco
ISSN
1882-0778
Issue
2
Journal
Applied Physics Express
Volume
5
Title
Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping
Publication type
Journal article
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