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Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping
Publication:
Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping
Date
2012
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Impellizzeri, Giuliana
;
Napolitani, Enrico
;
Boninelli, Simona
;
Privitera, Vittorio
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Priolo, Francesco
Journal
Applied Physics Express
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1917
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1917
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations