dc.contributor.author | Inoue, Fumihiro | |
dc.contributor.author | Philipsen, Harold | |
dc.contributor.author | Armini, Silvia | |
dc.contributor.author | Radisic, Alex | |
dc.contributor.author | Civale, Yann | |
dc.contributor.author | Leunissen, Peter | |
dc.contributor.author | Shingubara, Shose | |
dc.date.accessioned | 2021-10-20T11:47:31Z | |
dc.date.available | 2021-10-20T11:47:31Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20846 | |
dc.source | IIOimport | |
dc.title | Bath stability monitoring for electroless Cu seed formation in high aspect ratio TSV | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Inoue, Fumihiro | |
dc.contributor.imecauthor | Philipsen, Harold | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.imecauthor | Radisic, Alex | |
dc.contributor.orcidimec | Philipsen, Harold::0000-0002-5029-1104 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2727 | |
dc.source.conference | ECS Fall Meeting Symposium E8: Processing Materials of 3D Interconnects | |
dc.source.conferencedate | 7/10/2012 | |
dc.source.conferencelocation | Honolulu, HI Hawaii | |
dc.identifier.url | http://ecsdl.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=MAECES001202000034002727000001&idtype=cvips | |
imec.availability | Published - imec | |
imec.internalnotes | ECS Meeting Abstracts; Vol. 2012-02 | |