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Pulsed laser deposited-PZT based MEMS energy harvesting devices

dc.contributor.authorJambunathan, Madhu
dc.contributor.authorElfrink, Rene
dc.contributor.authorVullers, Ruud
dc.contributor.authorvan Schaijk, Rob
dc.contributor.authorDekkers, M.
dc.contributor.authorBroekmaat, J.
dc.date.accessioned2021-10-20T11:51:24Z
dc.date.available2021-10-20T11:51:24Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20859
dc.sourceIIOimport
dc.titlePulsed laser deposited-PZT based MEMS energy harvesting devices
dc.typeProceedings paper
dc.contributor.imecauthorElfrink, Rene
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceInternational Symposium on Applications of Ferroelectrics, held jointly with ... - ISAF/ECAPD/PFM
dc.source.conferencedate9/07/2012
dc.source.conferencelocationAveiro Portugal
imec.availabilityPublished - open access


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