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Patterning challenges of optical waveguides for sensing applications

dc.contributor.authorJamieson, Geraldine
dc.contributor.authorBaier, Ulrich
dc.contributor.authorDuval, Fabrice
dc.contributor.authorVerheyen, Peter
dc.contributor.authorAbsil, Philippe
dc.contributor.authorLepage, Guy
dc.date.accessioned2021-10-20T11:51:41Z
dc.date.available2021-10-20T11:51:41Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20860
dc.sourceIIOimport
dc.titlePatterning challenges of optical waveguides for sensing applications
dc.typeMeeting abstract
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorLepage, Guy
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.source.peerreviewyes
dc.source.conferenceMicro and Nano Engineering Conference - MNE
dc.source.conferencedate16/09/2012
dc.source.conferencelocationToulouse France
imec.availabilityPublished - imec


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