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Characterization of B-doped ultra-nanocrystalline diamond films grown by plasma enhanced CVD under a continuous DC bias

dc.contributor.authorJanssen, W.
dc.contributor.authorRuttens, B.
dc.contributor.authorDegutis, G.
dc.contributor.authorLu, Y.G.
dc.contributor.authorTurner, S.
dc.contributor.authorVerbeeck, J.
dc.contributor.authorVan Tendeloo, G.
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHardy, An
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-20T11:52:32Z
dc.date.available2021-10-20T11:52:32Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20863
dc.sourceIIOimport
dc.titleCharacterization of B-doped ultra-nanocrystalline diamond films grown by plasma enhanced CVD under a continuous DC bias
dc.typeOral presentation
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XVII
dc.source.conferencedate14/03/2012
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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