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Early resistance change and stress/electromigration modeling in aluminum interconnects

dc.contributor.authorPetrescu, Violeta
dc.contributor.authorMouthaan, A. J.
dc.contributor.authorSchoenmaker, Wim
dc.date.accessioned2021-09-30T09:24:33Z
dc.date.available2021-09-30T09:24:33Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2087
dc.sourceIIOimport
dc.titleEarly resistance change and stress/electromigration modeling in aluminum interconnects
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1491
dc.source.endpage1494
dc.source.conferenceProceedings of 8th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF 97; October 1997.
dc.source.conferencelocation
imec.availabilityPublished - open access


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