Ultra-low-k by CVD: deposition and curing

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Authors
Jousseaume, Vincent; Zenasni, Aziz; Gourhant, Olivier; Favennec, Laurent; Baklanov, Mikhaïl
Book
Advanced Interconnects for ULSI Technology
Title
Ultra-low-k by CVD: deposition and curing
Publication type
Book chapter
Embargo date
9999-12-31
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