Atom-probe for arsenic implant doped FinFET characterization
dc.contributor.author | Kambham, Ajay Kumar | |
dc.contributor.author | Kumar, Arul | |
dc.contributor.author | Gilbert, Matthieu | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-20T12:03:34Z | |
dc.date.available | 2021-10-20T12:03:34Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20898 | |
dc.source | IIOimport | |
dc.title | Atom-probe for arsenic implant doped FinFET characterization | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | no | |
dc.source.conference | 53rd International Field Emmission Symposium | |
dc.source.conferencedate | 21/05/2012 | |
dc.source.conferencelocation | Tuscaloosa USA | |
imec.availability | Published - imec |
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