Publication:

Molybdenum Silicide Based Attenuated Phase-Shift Masks

Date

1994

Journal article

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Author(s)

Jonckheere, Rik

;

;

;

Van den hove, Luc

Journal

J. Vac. Sci. Technol. B

Metrics

1947 since deposited on 2021-09-29

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Acq. date: 2025-12-27