Publication:

Molybdenum Silicide Based Attenuated Phase-Shift Masks

Date

1994

Journal article

Simple item page Full metadata Statistics

Author(s)

Jonckheere, Rik

;

;

;

Van den hove, Luc

Journal

J. Vac. Sci. Technol. B

Metrics

1947 since deposited on 2021-09-29

6last month

Acq. date: 2025-12-13