Show simple item record

Molybdenum Silicide Based Attenuated Phase-Shift Masks

dc.contributor.authorJonckheere, Rik
dc.contributor.authorRonse, Kurt
dc.contributor.authorPopa, Ovidiu
dc.contributor.authorVan den hove, Luc
dc.date.accessioned2021-09-29T12:42:30Z
dc.date.available2021-09-29T12:42:30Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/208
dc.sourceIIOimport
dc.titleMolybdenum Silicide Based Attenuated Phase-Shift Masks
dc.typeJournal article
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorVan den hove, Luc
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.source.peerreviewno
dc.source.beginpage3765
dc.source.endpage3772
dc.source.journalJ. Vac. Sci. Technol. B
dc.source.issue6
dc.source.volume12
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record