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Pupil wavefront manipulation for optical nanolithography

dc.contributor.authorKempsell Sears, Monica
dc.contributor.authorBekaert, Joost
dc.contributor.authorSmith, Bruce W.
dc.date.accessioned2021-10-20T12:08:43Z
dc.date.available2021-10-20T12:08:43Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20913
dc.sourceIIOimport
dc.titlePupil wavefront manipulation for optical nanolithography
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage832611
dc.source.conferenceOptical Microlithography XXV
dc.source.conferencedate12/02/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings SPIE; Vol. 8326


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