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Measurement of nonuniform stresses in semiconductor films by optical methods

dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorJain, Suresh
dc.contributor.authorMaes, Herman
dc.contributor.authorVan Overstraeten, Roger
dc.contributor.authorWillander, M.
dc.contributor.authorAtkinson, A.
dc.date.accessioned2021-09-30T09:25:04Z
dc.date.available2021-09-30T09:25:04Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2091
dc.sourceIIOimport
dc.titleMeasurement of nonuniform stresses in semiconductor films by optical methods
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceMaterials Research Society 1997 Fall Meeting : Symposium on Thin Film Stresses and Mechanical Properties; December 1-5, 1997; Bo
dc.source.conferencelocation
imec.availabilityPublished - imec


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